By Topic

Invariant-Feature-Pattern-Based Form Characterization for the Measurement of Ultraprecision Freeform Surfaces

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Ming Jun Ren ; Partner State Key Laboratory of Ultra-precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong ; Chi Fai Cheung ; Ling Bao Kong ; Xiangqian Jiang

Ultraprecision freeform surfaces (UPFSs) are increasingly being used in advanced optical systems due to their superior optical properties. However, current research on the measurement of machined UPFSs is still hindered by lack of efficient and robust form characterization techniques which can characterize the form error of measured freeform surfaces with submicrometer accuracy. This paper presents an invariant-feature-pattern-based form characterization (IFPFC) method. IFPFC makes use of intrinsic surface features (e.g., Gaussian curvature) to map the surface into an orientation-independent feature pattern to represent the surface geometry. Surface matching and comparison are then undertaken in terms of feature pattern registration. Compared with conventional methods, the IFPFC is not only robust to the initial position of the measured surface relative to the design template but also computationally efficient since it does not involve much iteration. A series of computer simulations and actual measurement are conducted to demonstrate the performance and the validity of the IFPFC method in the measurement and characterization of UPFSs with submicrometer form accuracy.

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:61 ,  Issue: 4 )