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Finite element analysis of a lateral microelectro-thermal actuator

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3 Author(s)
A. A. Aziz ; Faculty of Electrical Engineering, Universiti Teknologi MARA, 40460 Shah Alam, Selangor ; M. S. Rahman ; Hasnizah Aris

This paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator.

Published in:

Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on

Date of Conference:

28-30 Sept. 2011