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In the consumer era, the demand for more hot lots that enjoy differentiated cycle time service is increasing for semiconductor wafer fabrication. This study developed data mining techniques to explore the complex relationships between cycle times and related factors in a fab. Decision tree was constructed in manufacturing data mining to analyze key factor in the production cycle time. Using the IF THEN rules to control the factors. The explored patterns can support the decision making for managing production cycle time.
Date of Conference: 5-6 Sept. 2011