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A novel stacked gated twin-bit SONOS memory for high-density nonvolatile flash memory is introduced. We introduced gated twin-bit (GTB) memory previously that has a cut-off gate and two memory nodes at a single wordline. To increase the density of the GTB memory integration, we stacked poly-silicon gates in a vertical direction. In a 4F2 size, we can integrate 2 N memory nodes, where N is the number of stacked gates. In this paper, its fabrication method is introduced and electrical characteristics are investigated thoroughly by device simulations.
Date of Publication: March 2012