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Ultra-Thin flexible eddy current sensor array for gap measurements

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3 Author(s)
Ding, Tianhuai ; Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China ; Chen, Xianglin ; Huang, Yiping

An ultra-thin flexible eddy current proximity sensor array was developed for online measurements of tiny gaps between large smooth metallic and nonmetallic surfaces of arbitrary shapes. The probe of the flexible eddy current sensor array, which includes a set of sensor coils, is fabricated on a thin flexible substrate using the flexible printed circuit board process which allows the probe to be very thin and flexible so that it can conform to the surface geometry of the measured objects. The sensor coils are connected to an inductance-capacitance oscillator, which converts the distance between the sensor coil and the metallic target to a frequency output. Experimental results show that the measurement accuracy of the sensor system can reach ±0.5% for a 2-mm gap and the sensor system is suitable for online gap measurements.

Published in:

Tsinghua Science and Technology  (Volume:9 ,  Issue: 6 )