Skip to Main Content
A novel composite-current driven synchronous permanent magnet planar motor(CCDSPMPM) used for lithography machine in the future is proposed in this paper. The operation principle and structure of this planar motor are introduced. Analytical solutions to determine the field of the motor are deduced. The correctness of the solutions is validated by comparison of the results obtained by analytic method and by finite element method. Based on the analytic solutions, the electromagnetic forces and back-EMF of the unit planar motor are also deduced in this paper.
Date of Conference: 20-23 Aug. 2011