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Simultaneous determination of electrical conductivity and thickness of the semiconductor layers in the dielectric-semiconductor structures as per microwave reflection spectra

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2 Author(s)
Usanov, D.A. ; Saratov State Univ. n.a. N.G. Chernyshevskiy, Saratov, Russia ; Postelga, A.E.

The present paper confirms possibility of determination of conductivity and thickness of semiconductor layers as per results of measurements of frequency dependence of a reflection factor of electromagnetic microwave radiation at different temperature values. The appropriate inverse problem solution technique is proposed.

Published in:

Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference

Date of Conference:

12-16 Sept. 2011

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