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FEM simulation and its application in MEMS design

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6 Author(s)
Chenping Jia ; Center for Micro Technol. (ZFM), Chemnitz Univ. of Technol., Chemnitz, Germany ; Reuter, D. ; Zhiyu Wen ; Baum, M.
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This paper presents the simulated static and dynamic properties of a micro capacitive transducer by using commercial FEM software - ANSYS. Evaluation of the stress distribution in the stretched membrane of the transducer indicates that the location of the access holes plays an important role for reliable device fabrication and operation. Acoustic simulation shows that the pressure variation in the radiation field of a piston source can be explicitly demonstrated. Experiment results validate the effectiveness of FEM simulation as a useful tool for the design of MEMS devices and rough estimation of their properties.

Published in:

Semiconductor Conference Dresden (SCD), 2011

Date of Conference:

27-28 Sept. 2011