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Wafer by Wafer Low Dose Rate Qualification in a Production Environment

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9 Author(s)

We report details of a low dose rate wafer by wafer acceptance testing program proposed for Intersil RHA products, including sampling and test methods. We also discuss the design of a vault-type 60Co irradiation facility.

Published in:

Radiation Effects Data Workshop (REDW), 2011 IEEE

Date of Conference:

25-29 July 2011