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Three-Dimensional nand Flash Architecture Design Based on Single-Crystalline STacked ARray

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11 Author(s)
Yoon Kim ; Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea ; Jang-Gn Yun ; Se Hwan Park ; Wandong Kim
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Various critical issues related with 3-D stacked nand Flash memory are examined in this paper. Our single-crystalline STacked ARray (STAR) has many advantages such as better scalability, possibility of single-crystal channel, less sensitivity to 3-D interference, stable virtual source/drain characteristic, and more extendability over other stacked structures. With STAR, we proposed a unit 3-D structure, i.e., “building.” Then, using this new component, 3-D block and full chip architecture are successfully designed. For the first time, the structure and operation methods of the “full” array are considered. The fully designed 3-D nand Flash architecture will be the novel solution of reliable 3-D stacked nand Flash memory for terabit density.

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Electron Devices, IEEE Transactions on  (Volume:59 ,  Issue: 1 )