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Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning

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9 Author(s)
Gierl, C. ; Inst. fuer Mikrowellentech. und Photonik, Tech. Univ. Darmstadt, Darmstadt, Germany ; Gründl, T. ; Zogal, K. ; Davani, H.A.
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For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74 nm in the range of 1.55 μm and a wavelength tuning speed of ~200 kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiOx and SiNy deposited with low temperature (<;100°C) plasma enhanced chemical vapour deposition. The maximum fibre-coupled optical output power of the VCSEL is 1.8 mW and >;1 mW over the entire tuning range. The sidemode suppression ratio is >;40 dB.

Published in:

Electronics Letters  (Volume:47 ,  Issue: 22 )