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The electrical performance of metal-insulator-metal capacitors with thicknesses from 3 to 13 nm was investigated. The magnitude of the negative quadratic voltage coefficient of capacitance (VCC) of was found to be inversely proportional to the square of its thickness. A postdeposition anneal at 400 reduced substantially. An equation based on the orientation polarization of the dipole moments in was derived, which fits the measured normalized capacitance density versus voltage across very well. This suggests that the negative quadratic VCC of is due to the orientation polarization.