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A silicon probe with integrated microheaters for thermal marking and monitoring of neural tissue

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2 Author(s)
Jingkuang Chen ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; K. D. Wise

This paper describes a microheater structure and its integration on a silicon microprobe. The 30-μm-diameter microstructure can be used to heat local areas of tissue or to measure local tissue temperature with an accuracy of <0.3°C. The polysilicon microheater is suspended on a dielectric membrane to reduce undesired heat conduction to the probe substrate. The heating efficiency is 4.4°C/mW in still water and 2.2°C/mW in guinea pig cortex. Six milliwatts applied for 2 min in cortex produces a temperature of 50°C, creating a well-defined 50-μm-wide lesion for determining probe position histologically. Fabrication of the heaters requires no additional masking or processing steps in addition to those normally used for recording or stimulating probes.

Published in:

IEEE Transactions on Biomedical Engineering  (Volume:44 ,  Issue: 8 )