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Very low energy implanted Bragg gratings in SOI for wafer scale testing applications

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9 Author(s)
Loiacono, R. ; Adv. Technol. Inst., Univ. of Surrey, Guildford, UK ; Topley, R. ; Nakyobe, A. ; Mashanovich, G.
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We present Bragg gratings with an effective index change introduced by implanting germanium at only 15KeV. An extinction ratio of 35dB at 1350nm is demonstrated for device lengths of 600μm, furthermore laser annealing is demonstrated.

Published in:

Group IV Photonics (GFP), 2011 8th IEEE International Conference on

Date of Conference:

14-16 Sept. 2011