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Contribution to thick film interdigital capacitor characterization

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2 Author(s)
Pulec, J. ; Dept. of Microelectron., Brno Univ. of Technol., Brno, Czech Republic ; Szendiuch, I.

This article deals with characterization of thick film interdigital capacitors, where attention is devoted to the influence of air gap width on capacitance. Air gap serves as dielectric and the scope of interest is dependence of the capacitance on air gap width. The set of interdigital capacitors was created with different air gap width. These capacitors were measured and result is evaluated in this article.

Published in:

Electronics Technology (ISSE), 2011 34th International Spring Seminar on

Date of Conference:

11-15 May 2011