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The synthesis of carbon nanotubes has been demonstrated using a two stage chemical vapour deposition process involving a high temperature stage to crack the carbon source and a lower temperature catalytic carbon nanotube growth stage. Pre-formed nickel nanoparticles have been used to catalyse the formation of carbon nanotubes and carbon nanofibres, depending on the reaction temperature. These results suggest that this may be a route to produce nanotubes at temperatures low enough to allow the one step formation of nanotube interconnects on devices.
Date of Conference: 22-26 Feb. 2010