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OWL-S, one of the most significant Semantic web service ontologies proposed to date, provides Web Service providers with a core ontological framework and guidelines for describing the properties and capabilities of their web Services in unambiguous, computer interpretable form. In this paper, we propose a probabilistic model for OWL-S processes, employing the Non-markovian stochastic Petri net(NMSPN) as the intermediate representation. A set of translation rules is defined for constructs and activities of OWL-S so that processes specified in OWL-S can be translated into NMSPN. Based on the NMSPN representation, analytical methods for QoS analysis can be designed.