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Our goal in this work is to achieve a tunable photonic crystal micro-opto-electro-mechanical system which excites two resonances with opposite polarization. In order to get a polarization selectivity we use two-dimensional photonic crystals with periodically arranged elliptical holes. We investigate the tunability and make statements about parameters that play an important role in optimization of this system. A final design is found for our goal. For the computation we use a three-dimensional finite element solver which solves the inhomogeneous Helmholtz equation.
Date of Conference: 5-8 Sept. 2011