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Properties of shear horizontal acoustic plate modes in BT-Cut quartz

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2 Author(s)
Soluch, W. ; Inst. of Electron. Mater. Technol., Warsaw, Poland ; Lysakowska, M.

Properties of shear horizontal acoustic plate modes (SHAPMs) in BT-cut quartz were calculated and measured. A delay line with a long interdigital transducer, deposited on -50.5°YX90°-oriented quartz plate, was used for the measurements. For one of the SHAPMs, at a frequency of about 100.4 MHz, insertion loss, turnover temperature, and quadratic temperature coefficient of frequency of about 10 dB, 15°C, and -30 ppb/(°C)2 in air, respectively, were obtained. Using water and glycerin solutions, insertion loss changes against dynamic viscosity were measured for this mode. In a viscosity range from about 1 mPa·s to 1000 mPa·s, an insertion loss change of about 14 dB was obtained.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:58 ,  Issue: 10 )

Date of Publication:

October 2011

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