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Microplasma Jets Generated by Arrays of Microchannels Fabricated in Flexible Molded Plastic

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4 Author(s)
Ma, J.H. ; Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA ; Shih, D.C. ; Park, S.-J. ; Eden, J.G.

Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 × 2 have been constructed and demonstrated to date. Having a channel diameter of 340 ± 5 μm and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend ~3.6 mm into laboratory air for a He gas flow rate of ~4.6 standard liters per minute.

Published in:

Plasma Science, IEEE Transactions on  (Volume:39 ,  Issue: 11 )

Date of Publication:

Nov. 2011

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