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A 64 Mb SRAM macro has been fabricated in a 32 nm high-k metal-gate SOI technology. The SRAM features a 0.154 μm2 bit-cell, the smallest to date for a 32 nm SOI product. A 0.7 V VDDMIN operation is enabled by three assist features. Stability is improved by a bit-line regulation scheme which reduces charge injection into the bit-cell. Enhancements to the write path include an increase of 40% of bit-line boost voltage. Finally, a bit-cell-tracking delay circuit improves both performance and yield across the process space.