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A dual-axis high fill-factor micromirror array for high thermal loads

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6 Author(s)
Ataman, C. ; Sensors, Actuators & Microsyst. Lab. (SAMLAB), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland ; Lani, S. ; Noell, W. ; Jutzi, F.
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A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of ±4 degrees.

Published in:

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Date of Conference:

8-11 Aug. 2011