Design and fabrication of polymer MEMS mirror based on the mechanical characteristic evaluation of polyimide materials

We fabricated millimeter size tensile specimens using the photosensitive polyimide as the moving part of the our proposed polymer MEMS mirror device. The mechanical characteristics of the polyimide are evaluated in the temperature range of -50~300°. As the result, Young's modulus and tensile strength of the photosensitive polyimide also decreased as the temperature increased, but there was no substantial change in the characteristic values in the supposed usage temperature range of -10~70°. Based on the results, the polymer MEMS mirror torsion bar was designed and the deflection value was simulated by FEM analysis. The designed and measured angles show relative good agreement.