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In this paper, a unified tuning rule of the motion profiles for less vibration with flexible system is proposed. For the motion profiles including trapezoidal velocity profile, S and AS curve, the tuning rule is formulated using a Laplace-domain approach. By placing zeros of the motion profiles on poles of the system, which is so-called pole-zero cancellation, the vibration mode of the system can be eliminated, which results in obtaining shorter settling time. Through the Laplace-domain approach, conditions for reducing the residual vibration are derived systematically and the proposed approach can illustrate the characteristics of the motion profiles with ease. The effectiveness of the proposed tuning rule will be illustrated and verified by simulation with a XY stage with flexural structure.
Date of Conference: 3-7 July 2011