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Quantitative cleaning characterization of a lithium-fluoride ion diode

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2 Author(s)
Menge, P.R. ; Intense Beam Res. Dept., Sandia Nat. Labs., Albuquerque, NM, USA ; Cuneo, M.E.

An ion source cleaning testbed was created to test plasma-cleaning techniques, and to provide quantitative data on plasma-cleaning protocols prior to implementation on the SABRE accelerator. The testbed was designed to resolve issues regarding the quantity of contaminants absorbed by the anode source (LiF), and the best cleaning methodology. A test chamber was devised containing a duplicate of the SABRE diode. Radio-frequency (RF) power was fed to the anode, which was isolated from ground and thus served as the plasma discharge electrode. RF plasma discharges in 1-3 mtorr of Ar with 10% O2 were found to provide the best cleaning of the LiF surface. X-ray photoelectron spectroscopy (XPS) showed that the LiF could accrue dozens of monolayers of carbon just by sitting in a 2×10-5 vacuum for 24 h. Tests of various discharge cleaning protocols indicated that 15 min of an Ar/O2 discharge was sufficient to reduce this initial 13-45 monolayers of carbon impurities to 2-4 monolayers. Rapid recontamination of the LiF was also observed. Up to ten monolayers of carbon returned in 2 min after termination of the plasma discharge and subsequent pumping back to the 10-5 torr range. Heating of the LiF also was found to provide anode cleaning. Application of heating combined with plasma cleaning provided the highest cleaning rates

Published in:

Plasma Science, IEEE Transactions on  (Volume:25 ,  Issue: 2 )

Date of Publication:

Apr 1997

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