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A transparent hard coating of Organosilicon (SiOx) material can protect plastics and metals. This investigation on SiOx was to optimize a protective film for plastic lenses and covers of mobile phones to upscale the process to an industrial size. Hexamethyldisiloxane and oxygen has been used as precursor gas. The coating was deposited using plasma enhanced chemical vapour deposition (PECVD). Analysis of the coating by means of the optical microscope and atomic force microscope (AFM) shows that there are four kinds of micro pizza defects classed. Mechanism on defects of the organosilicon coating is discussed.