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Towards high resolution pico-projector applications: Design improvements on MEMS scanning mirror

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6 Author(s)
Wei Ma ; Material and Packaging Technologies Group, Hong Kong Applied Science and Technology Research Institute Company Limited, Hong Kong ; Ho- Yin Chan ; Chun Cheong Wong ; Checky Yiu
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Design and implementation of a micro scanning mirror for the application of WVGA resolution (848×480) pico-projector display is presently reported. A FEM model for damping coefficient analysis is built and shows a good agreement with experiment result. In addition, stress study for the torsional bar is performed to deal with fracture issue. With the consideration on damping coefficient and stress in torsional bar, the new designed and implemented micro scanning mirror has shown to have a >;6° scanning angle at 21kHz resonant frequency.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Date of Conference:

20-23 Feb. 2011