Cart (Loading....) | Create Account
Close category search window
 

Reduced dimensional analysis on dynamic characteristics of microcantilever beams in the fluid environment and application to atomic force microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Kuan-Rong Huang ; Inst. of Appl. Mech., Nat. Taiwan Univ., Taipei, Taiwan ; Zhan-Yi Liao ; Jeng-Shian Chang ; Chao, S.D.
more authors

This paper is mainly aimed to investigate the dynamic characteristics of a microbeam structure located at the neighborhood of a wall inside the chamber filled with different fluids. Firstly, by solving the Reynolds equation and the Euler beam equation, specific dynamic characteristics of the entire system such as the resonant frequency, the frequency shift, and the damping ratio can be obtained. Secondly, by relating the calculated dynamic characteristics to the frequency response of a reduced dimensional system, the effective mass, damping and stiffness can be evaluated for the beam structure in the fluid near the chamber wall. The coupling dynamic behavior can be understood by analyzing these extended physical parameters, namely, the effective mass, damping and stiffness. Finally, the preceding analytic procedure is used to demonstrate the limitation on the tip size of the probe of an atomic force microscope operated in non-contact mode within fluid environment.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Date of Conference:

20-23 Feb. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.