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Fabrication and testing of a novel silicon probe for micromachined surface profilers

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5 Author(s)
Senlin Jiang ; National Key Laboratory of Science and Technology on Micro/Nano Fabrication and Institute of Microelectronics, Peking University, Beijing, 100871 China ; Dacheng Zhang ; Longtao Lin ; Zhenchuan Yang
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In this paper, we present the fabrication and testing of a novel probe for micromechanical surface profiler with double-ended tuning forks (DETFs) resonator as the displacement-sensing element. The probe is fabricated through the standard silicon-on-glass process developed by Peking University. The frequency variation of the DETF caused by the induced axial stress is directly proportional to the input displacement. Two stages micro-leverage mechanisms are introduced for force amplification to increase the overall sensitivity. The experimental results indicate the device has a nominal resonant frequency of 54.5 kHz under atmosphere at room temperature and the overall sensitivity is approximately 359.7 Hz/μm, which shows a good agreement with the simulation value of 330 Hz/μm using ANSYS™. Furthermore, the testing results depict the variation of frequency is linear to the displacement load within the range of 10μm.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Date of Conference:

20-23 Feb. 2011