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A metal contact RF MEMS switch was fabricated based on the micro electroplating technology. With the optimized electroplating parameters, the plated Au beam showed very low stress/stress gradient, indicated by a deformation (tip-up) less than 1 μm after release and an annealing process. The pull-in voltage at different temperatures, ranging from 25°C to 90°C, was investigated for switches with and without the annealing process. The switching characteristics were studied under different actuation voltages and temperatures. The DC testing results revealed that a fast, stable (less beam vibration) and temperature-independent switching process could be realized if the actuation voltage was set to be, for example 10%, larger than the pull-in voltage.
Date of Conference: 20-23 Feb. 2011