By Topic

Switching characteristics of a thermally-stable metal contact RF MEMS switch

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Peigang Deng ; Peking University Shenzhen SoC Key Lab, China ; Ping Wang

A metal contact RF MEMS switch was fabricated based on the micro electroplating technology. With the optimized electroplating parameters, the plated Au beam showed very low stress/stress gradient, indicated by a deformation (tip-up) less than 1 μm after release and an annealing process. The pull-in voltage at different temperatures, ranging from 25°C to 90°C, was investigated for switches with and without the annealing process. The switching characteristics were studied under different actuation voltages and temperatures. The DC testing results revealed that a fast, stable (less beam vibration) and temperature-independent switching process could be realized if the actuation voltage was set to be, for example 10%, larger than the pull-in voltage.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Date of Conference:

20-23 Feb. 2011