Cart (Loading....) | Create Account
Close category search window
 

XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Lu, Jong-Hong ; Dept. of Mater. Eng., Ming Chi Univ. of Technol., Taipei, Taiwan ; Bo-Ying Chen ; Hua-Chung Tzou

Nano-multi-layer (NML) ceramic thin films with the periodic (ITO/AlON)n and (ITO/SiOx)m structures were fabricated by the magnetron sputtering. The nano-size of film thickness was characterized by x-ray reflection (XRR) technique and field emission scanning electron microscopy (FE-SEM). The non-destructive XRR technique was able to analyze the NML films under sub-nano-meter-grade resolution quickly and precisely. From the XRR theoretical studies, two methods were used to simulate the characterization result in this study, the multiple-beam-interference (MBI) recursive method and the characteristic matrix method. Both methods show same calculation results. Finally, the periodic thickness and uniformity of NML thin films were compared by XRR and FE-SEM.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Date of Conference:

20-23 Feb. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.