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Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators

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3 Author(s)
Koh, K.H. ; Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore ; Kobayashi, T. ; Chengkuo Lee

Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications.

Published in:

Opto-Electronics and Communications Conference (OECC), 2011 16th

Date of Conference:

4-8 July 2011