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Piezoresistive Strain Sensors and Multiplexed Arrays Using Assemblies of Single-Crystalline Silicon Nanoribbons on Plastic Substrates

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8 Author(s)
Sang Min Won ; Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA ; Hoon-Sik Kim ; Nanshu Lu ; Dae-Gon Kim
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This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.

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Electron Devices, IEEE Transactions on  (Volume:58 ,  Issue: 11 )