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Profiling of barrier capacitance and spreading resistance using a transient linearly increasing voltage technique

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3 Author(s)
Gaubas, E. ; Vilnius University, Institute of Applied Research, Sauletekio av. 9-III, LT-10222 Vilnius, Lithuania ; Ceponis, T. ; Kusakovskij, J.

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A technique for the combined measurement of barrier capacitance and spreading resistance profiles using a linearly increasing voltage pulse is presented. The technique is based on the measurement and analysis of current transients, due to the barrier and diffusion capacitance, and the spreading resistance, between a needle probe and sample. To control the impact of deep traps in the barrier capacitance, a steady state bias illumination with infrared light was employed. Measurements of the spreading resistance and barrier capacitance profiles using a stepwise positioned probe on cross sectioned silicon pin diodes and pnp structures are presented.

Published in:

Review of Scientific Instruments  (Volume:82 ,  Issue: 8 )