Cart (Loading....) | Create Account
Close category search window

Lateral resolution of the NFESE microscopy and the existence of self focusing of electrons

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Kyritsakis, A. ; Dept. of Electr. & Comput. Eng., Nat. Tech. Univ. of Athens, Athens, Greece ; Xanthakis, J.P. ; Kirk, T.L. ; Pescia, D.

We have calculated the lateral resolution (LR) of the electron beams emitted from sharp tips used in the near field emission SEM (NFESEM). To this end we have simulated the tip as an ellipsoid and have used a 3-dimensional WKB approximation. We find a self focusing of the electron beam which can explain the small experimental values of the observed LR of the NFESEM. This self focusing is highly sensitive on the sharpness S=R1/R2 of the tip where R1 and R2 are the big and small radius of the ellipsoid simulating the tip. However it is not sensitive on any particular radius alone.

Published in:

Vacuum Nanoelectronics Conference (IVNC), 2011 24th International

Date of Conference:

18-22 July 2011

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.