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A survey of run-to-run control algorithms for high-mix semiconductor manufacturing processes

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3 Author(s)
Ma Ming-Da ; Center for Control & Guidance Technol., Harbin Inst. of Technol., Harbin, China ; Zeng Xian-Lin ; Duan Guang-Ren

The modeling and control of high-mix production system in semiconductor manufacturing impose great challenge for process engineers. Many different methods have been proposed to improve control performance of the high-mix system. In this paper, an overview of the recent control algorithms for high-mix system is presented. The thread-based methods and the non-threaded state estimation methods which are studied and practiced widely in semiconductor manufacturing are discussed in detail. Further research directions for the run-to-run control of mixed product system are pointed out based on the extensive study of current literatures.

Published in:

Control Conference (CCC), 2011 30th Chinese

Date of Conference:

22-24 July 2011