Design and Analysis of a Tunable Bandpass Filter Employing RF MEMS Capacitors

This letter presents an RF microelectromechanical systems (MEMS) tunable bandpass filter with a tuning range of 30%. An analytical process of designing a bandpass filter is also presented by using MEMS switch, series gap, and etched structure in coplanar waveguide (CPW). The designed structure of the MEMS switch and CPW is used to get a wide tuning range of the filter. The fabricated filter performances show an acceptable agreement between the measured results and the simulation results with a center frequency from 10 to 13.5 GHz.