Scheduled System Maintenance:
On May 6th, system maintenance will take place from 8:00 AM - 12:00 PM ET (12:00 - 16:00 UTC). During this time, there may be intermittent impact on performance. We apologize for the inconvenience.
By Topic

A nanometer scale alignment method of concentric spherical mirrors based on interferometry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
5 Author(s)
Liu Yu-juan ; Changchun Inst. of Opt., Fine Mech. & Phys., Chinese Acad. of Sci., Changchun, China ; Tang Yu-guo ; Chen Shaojie ; Xu Tai
more authors

A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed, which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors, the defocus can be measured real time with nanometer scale error. The experimental result shows that the method can achieve the defocus of the spherical concentric mirrors several nanometers.

Published in:

Nanoelectronics Conference (INEC), 2011 IEEE 4th International

Date of Conference:

21-24 June 2011