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TiSiN nanocomposite films have been deposited on YT15 cemented carbide by a cathodic arc plasma plating system. Strurcture, mechanical and tribological propeties were investigated by X-ray diffraction, Scanning electron microscope, tribometry, Profiler and Vickers indentation techniques, systemically. The results show that TiSiN films are the typical structure of TiN crystal inserted in amorphous S13N4. The maximum microhardness is about 4200 HV at 4Pa while the wear property is the best at the pressure of 2 Pa, with an average friction coefficient of 0.54.
Date of Conference: 15-17 July 2011