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Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMS

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4 Author(s)
Hurst, K.M. ; Dept. of Chem. Eng., Auburn Univ., Auburn, AL, USA ; Ansari, N. ; Roberts, C.B. ; Ashurst, W.R.

In an effort to improve the reliability of microelectromechanical systems (MEMS), silica thin films deposited by chemical vapor deposition were used to encapsulate gold nanoparticle coatings. These composite coatings were shown to provide extremely durable films that significantly reduce the adhesion energy of silicon-based microcantilever beams. The results discussed suggest that encapsulating nanoparticle films with a durable silica thin film may lead to improved MEMS reliability.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 5 )