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Scanning transmission low-energy electron microscopy

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5 Author(s)
I. Mullerova ; Institute of Scientific Instruments ASCR, Brno, Czech Republic ; M. Hovorka ; I. Konvalina ; M. Uncovsky
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We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing the apparent transmissivity of the sample to more than 100%. Provisional filtering off of the SEs, providing the dark-field signal of forward-scattered electrons, was made using an annular 3-D adjustable detector inserted below the sample. Demonstration experiments were performed on the graphene flakes and on a 3-nm-thick carbon film. Electron penetrability at the lowest energies was measured on the graphene sample.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:55 ,  Issue: 4 )