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Terahertz Direct Detection in {\hbox {YBa}}_{2}{\hbox {Cu}}_{3}{\hbox {O}}_{7} Microbolometers

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5 Author(s)
Hammar, A. ; Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Goteborg, Sweden ; Cherednichenko, S. ; Bevilacqua, S. ; Drakinskiy, V.
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A high sensitivity broadband terahertz direct detector based on YBa2Cu3O7 high-Tc superconductor microbolometers is presented. At 77 K, the responsivity of the spiral antenna-integrated microbolometers (1.5 μm ×1.5 μm) is 190 V/W, referenced to the input of the silicon substrate lens, across the frequency range of 330 GHz-1.63 THz in a single device. The response time is approximately 300 ps. Using a room temperature readout, we measure an optical noise equivalent power (NEP) of 20 pW/Hz0.5 (readout noise limited) for modulation frequencies ranging from 500 Hz to 100 kHz.

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Terahertz Science and Technology, IEEE Transactions on  (Volume:1 ,  Issue: 2 )