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3D heterogeneous system integration: Application driver for 3D technology development

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3 Author(s)
Beyne, E. ; Imec, Leuven, Belgium ; Marchal, P. ; Van der Plas, G.

Three dimensional integration complements semiconductor scaling; it enables a higher integration density as well as heterogeneous technology integration. Using 3D chip stacking, it is possible to extend the number of functions per 3D chip well beyond the near-term capabilities of traditional scaling. The 3D strata may be realized using advanced CMOS technology nodes but may also exploit a wide variety of device technologies to optimize system performance.

Published in:
Design Automation Conference (DAC), 2011 48th ACM/EDAC/IEEE

Date of Conference: 5-9 June 2011

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