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Large area SrTiO3 thin films for active microwave applications grown by pulsed laser deposition

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7 Author(s)
Knauss, L.A. ; Naval Res. Lab., Washington, DC, USA ; Horwitz, J.S. ; Pond, J.M. ; Knies, D.L.
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Thin films of SrTiO3 have been grown by pulsed laser deposition (PLD) on 2" diameter LaAlO3 substrates using a technique in which the laser beam is rastered over the radius of a 4 inch diameter target while the substrate is rotated in a radiative blackbody heater. The deposition occurs through a pie shaped opening in the heater. The structure, composition and thickness have been measured using XRD and RBS. The dielectric properties of the film have been measured at 1 MHz utilizing an LCR meter. The results indicate that the films are single phase and (001) oriented. However, film composition, thickness and dielectric properties are not uniform along the radius of the film. The results indicate that the composition nonuniformity is due to off-axis deposition, and correlates with changes in the dielectric properties

Published in:

Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on  (Volume:2 )

Date of Conference:

18-21 Aug 1996