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We present microscale silicon resonators with nanoscale pores for increased surface area, which are capable of providing enhanced sensitivity in vapor sensors. Increased mechanical stability and detection performance are also achieved by keeping parts of the resonating device nonporous and adding a receptor coating. We demonstrate improvements up to 165% and 654% in resonator sensitivity to isopropyl alcohol (IPA) for partially-porous silicon resonators and receptor-coated partially-porous silicon resonators, respectively, as compared to nonporous silicon resonators.
Date of Conference: 2-5 May 2011