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Receptor-coated porous silicon resonators for enhanced sensitivity of vapor detection

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3 Author(s)
Yongha Hwang ; Electr. Eng. Dept., Univ. of California, Los Angeles, CA, USA ; Kim, Sungmin ; Candler, R.N.

We present microscale silicon resonators with nanoscale pores for increased surface area, which are capable of providing enhanced sensitivity in vapor sensors. Increased mechanical stability and detection performance are also achieved by keeping parts of the resonating device nonporous and adding a receptor coating. We demonstrate improvements up to 165% and 654% in resonator sensitivity to isopropyl alcohol (IPA) for partially-porous silicon resonators and receptor-coated partially-porous silicon resonators, respectively, as compared to nonporous silicon resonators.

Published in:

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Date of Conference:

2-5 May 2011

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