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Characterization of WO3 layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors

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9 Author(s)
M. David ; Université du Sud Toulon Var, IM2NP UMR CNRS 6242, La Garde, France ; M. Arab ; J. R. Gavarri ; D. Rabus
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Surface acoustic wave (SAW) gas sensors generally require the use of a reactive layer for molecule adsorption. WO3 has been identified for a long time as a high potential sensitive layer particularly for NH3, NOX, CO, etc. We report here on the characterization of elastic properties of such material using the dispersion behavior of SAW propagating under gratings passivated wich WO3 films of various thicknesses. Quartz as well as LiNbO3 SAW devices are used in that purpose, allowing for the derivation of a reliable data set. Complementary structural characterization using direct measurement techniques (DRX, AFM, TEM,) are reported to confirm the analysis deduced from SAW measurements. As a conclusion, the exploitation of WO3 for SAW-based sensor is discussed.

Published in:

2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings

Date of Conference:

2-5 May 2011