Cart (Loading....) | Create Account
Close category search window

Characterization of WO3 layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
David, M. ; IM2NP, Univ. du Sud Toulon Var, La Garde, France ; Arab, M. ; Gavarri, J.R. ; Rabus, D.
more authors

Surface acoustic wave (SAW) gas sensors generally require the use of a reactive layer for molecule adsorption. WO3 has been identified for a long time as a high potential sensitive layer particularly for NH3, NOX, CO, etc. We report here on the characterization of elastic properties of such material using the dispersion behavior of SAW propagating under gratings passivated wich WO3 films of various thicknesses. Quartz as well as LiNbO3 SAW devices are used in that purpose, allowing for the derivation of a reliable data set. Complementary structural characterization using direct measurement techniques (DRX, AFM, TEM,) are reported to confirm the analysis deduced from SAW measurements. As a conclusion, the exploitation of WO3 for SAW-based sensor is discussed.

Published in:

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Date of Conference:

2-5 May 2011

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.