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Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration

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3 Author(s)
Ming-Huang Li ; Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Wen-Chien Chen ; Sheng-Shian Li

Integrated CMOS-MEMS free-free beam resonator arrays operated in a standard two-port electrical configuration simultaneously with low motional impedance and high power handling capability centered at 10.5 MHz have been demonstrated by the combination of pull-in gap reduction mechanism and mechanically-coupled array design. The mechanical links (i.e., coupling elements) using short stubs connect each constituent resonator of an array to its adjacent ones at the high-velocity vibrating locations to accentuate the desired mode and reject all other spurious modes. A single second-mode free-free beam resonator with quality factor Q >; 2,200 and motional impedance Rm <; 150 kQ has been utilized to achieve mechanically-coupled resonator arrays in this work. In array design, a 9-resonator array has been experimentally characterized to have around 10X performance improvement on motional impedance and power handling as compared with that of a single resonator. In addition, two-port electrical configuration is much preferred due to its low feedthrough nature and high design flexibilities for future oscillator and filter implementation rather than its one-port counterpart.

Published in:

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Date of Conference:

2-5 May 2011