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This paper describes the design of a compact and highly repetitive pulsed power modulator based on semiconductor switches. Output specifications of the proposed modulator are as follows: variable output pulse voltage, 1-10 kV; width, 1-10 μs; pulse repetition rate (PRR), 1-50,000 pps; and average output power, 10 kW. The proposed solid-state pulsed power modulator has two main parts: an IGBT stack that hasa gate drive circuit for the pulse output with a variable pulse width and repetition rate, and a capacitor charger that has a controllable output voltage. To connect all the storage capacitors in a series for high voltage pulses, a simple and reliable IGBT stack structure was proposed based on the Marx generator. In addition, the gate driver circuit, which supplies power and signals to all the IGBTs simultaneously, was introduced. This providesa superior protection function against the arc and the short. To charge the storage capacitors, a novel 10 kW (10 kV, 1 A) high voltage capacitor charger with the combined advantage of a series-loaded resonant converter and a ZVS (zero-voltage-switching) full-bridge pulse width modulation (PWM) converter was proposed and designed especially for the solid-state pulsed power modulator. Theexperiment results verified that the proposed scheme and structure can be used effectively for a high voltage pulsed power modulator that requires variable voltage, repetition rate, and pulse width, depending on the process of the applications.