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Application of a novel capacitive sensor in precise positioning systems

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4 Author(s)
Tao Chen ; Robot. & Microsyst. Center, Soochow Univ., Suzhou, China ; Liguo Chen ; Mingqiang Pan ; Lining Sun

This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10 μm, with resolution of 5 nm.

Published in:

Industrial Electronics and Applications (ICIEA), 2011 6th IEEE Conference on

Date of Conference:

21-23 June 2011

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